| Specification | Details |
|---|---|
| Fluid Medium | Air (JIS B 8392-1:Class1.2.1～2.4.3 compliant), Vacuum |
| Operating pressure range | 0.3～0.7MPa |
| Working vacuum range | -90～0kPa |
| Operating Temperature Range | 5～50℃ (No freezing) |
| Operating humidity range | 35～85%RH (No dew condensation) |
| Vibration/Impact resistance | Max. 50m/s2 / Max. 150m/s2 |
| Protective structure | Equivalent to IEC IP40 |
| Lubrication | Not required |
| Proof pressure (Air supply circuit) | 1.05MPa |
| Proof pressure (Vacuum circuit) | 0.2MPa |
External Vacuum Controller VIP
Built-in flow sensor type (Industry’s first) is added to the lineup. Conventional pressure sensor mount type and no pressure sensor type are also prepared.
Recommendable to semiconductor related equipment (chip mounter and handler) and vacuum transfer equipment for miniature work piece.
